取扱修理対応品(取扱モデル)

AE(RFPP)

AM5AM10AM20AM25
AM30AM50AMNPAMNHS
Apex1513Apex3013Apex3k2pinApex5513
Apex10013Ascent 40k&60kAstral 20kATL 100
ATLAS 1513/2012ATX600ATX CPAZX 10
AZX 63AZX 72AZX 90 AZX Dome
Cesar 133Cesar 136Cesar 1310Cesar 1312
Cesar 1320Cesar 1325Cesar 1330Cesar 1350
Cesar 0210Cesar 2710Cesar 2720Cesar 405
Cesar 4020Cesar 4040Cesar 6020Cesar 6020
E-WaveFTMS 2kGenCalHFV 3k
HFV 5kHFV 8kICP10/20ID 2500/3500
ID 3501IDX IILF-5LF10
LF20LF30LFGS 1250Litmas 1501/3001
LM 5KLM 10KLR 853MDL II 10K
MDL II 15KMDX 500MDX 500 DUALMDX 1K/1.5K
MDX 2.5KMDX 208 5KMDX208 10KMDX308 10K
MDX 15KMDX 20KMDX 25KMDX 30K
MDX 35KMDX 40KMDX 50KMDX 60K
MDX II 15KMDX II 30KMDX-L 6KMDX-L 12K
MDX-L 15KMDX-L 18KMercury 1KMercury 3K
Mercury 10KMSD 350Navigator 1013-L35Navigator 2060
Navigator 3013Navigator 3013-ICPNavigator 4040Navigator 5060/5002
Navigator 5513Navigator 5513-L80Navigator 10013Ovation 2560
Ovation 2760Paramount 3kPDP 2500PDX 500
PDX 900PDX 1250PDX 1400PDX 2500
PDX 5000PDX 8000PDX II 2K & 3KPDW 2200
PE 1KPE 2.5KPE 3.75KPE 5K
PE 10KPE II 5KPE II 10KPinnacle 3000
Pinnacle I 6/6KPinnacle I 6-8KPinnacle I 12-15KPinnacle II 6K
Pinnacle II /6/6KPinnacle II 10KPinnacle II 10/10KPinnacle II 12K
Pinnacle II 20KPinnacle Plus+ 5KPinnacle Plus+ 5/5KPinnacle Plus+ 10K
Pinnacle Diamond 8KPinnacle Diamond 10KPinnacle Diamond 15KPulsar 40K
Pulsar 80KRapid FRapid OERF 5
RF10RF20RF25RF30
RF35RF50RFDS 1250RFDS 1251
RFDS 2K2VRFG 2K2VRFG 3000RFG 3001
RFG 3002RFG 5500RFX 600RFX 600A
RFX II 1250RFX II 3000RFX II 5500Sparc VS
Sparc-le 20KSparc-le 30KSparc-le IISparc-le V
STARBURSTSUMMIT 50K UNITSUMMIT 50K ModuleVario Match 600
Vario Match 700Vario Match 1000Vario Match 1200Vario Match 1500
Vario Match 3000Vario Match 5000VHF 2060Xstream
Z-scan   

ADTEC

AX-500 seriesAX-1000 seriesAX-2000 seriesAX-3000 series
TX03 seriesTX06 seriesTX06 seriesTX20 series
TX30 seriesTS05 seriesTS10 seriesTS20 series
TS30 seriesAMV1000-G5E seriesAMV1000-MATAMVG series
AM-1000 seriesAM-2000 seriesAW-3000AW-8000II
AMV-1000ASM-27MAMV-3000SMAMV-1000G5C series 

Trazar

AMU2-1AMU2C-1AMU10D-1AMU10D-2AMU10E-2AMU10G-2RDFS-1RFS1-3
SRN1-2       

MKS<ENI&ASTEX>

OEM-6 seriesOEM-650 seriesOEM-12 seriesOEM-1250
OEM-2000OEM-25 seriesOEM-28 seriesOEM-50 series
PL-2HF seriesPL-3GGMW-25AGMW-50A
LPG-1ATLPG-12AACG-6BACG-10T
MWD-25LD/55LDMHW-25-04MWH-25-04MWM-25-02X
NOVA-50AACG10 1出力DPG10 2出力DCG-100Z/200Z/400Z series
GHW-12ZGHW-25MAGNETRON HEADDC22M
DPGS-10DPGD-10ONE BOX OB2(2MHz)ONE BOX OB2(27MHz)
SXRHC/Smart MatchASTRON RPSC 2L/3L/6L/8L/15L/22L/30L
X-2115/2530/2630/7651/7685/7690PSK-04/8200/8560-7100/8560-3020/8555/9670
FI20160-1/20160-3/20045/20606/20606-1/20634/20162-1
MKS Baratron 622/623/625/626/627/628/629/722/750/751/E28B/E29B

COMDEL

CPS-100/13CPS-1000/13CPS-1000M/13CPS-1001/13CPS-1001S/13CPS-1001/60
CPS-1001S/60CX-600CX-600SCX-600S/13CLF-5000CLX-2500
CLX-1250SFP1543RACB seriesCX seriesCDX seriesCXH series
FR2241R3     

京三(KYOSAN)

RFK-20 SeriesRFK-30 SeriesRFK-50 SeriesRFK-75 Series
RFK-100 SeriesDFK45Z  

DAIHEN

DRFS-5SADRFS-5SAR2DRFS-10SBMFG-15SAMFG-20SAMFG-20SA1MFG-20SA3MFM-20SA2
AMN-30C11RMN-30D2RMN-50BRMN-75ARMN-75A1   

パール工業(PEARL)

LP-500-800KLP-2000-800KRP-150-2MRP-300-2MRP-300-1356RP-3000-27M

AMAT MATCH

0010-21748 PVD RF Match”300mm METAL ENDURA”0010-13878 PVD RF Match” METAL “
0010-02977 PVD RF Match” METAL “0010-15877 PVD RF Match” METAL “
0010-01929 PVD RF Match” METAL “0010-13627 PVD RF Match” METAL “
0010-22161 PVD RF Match” METAL “0010-02979 PVD RF Match” METAL “
0010-15878 PVD RF Match” METAL “0010-30236 PVD RF Match” METAL “
0010-02372 PVD RF Match”300mm METAL ENDURA”0010-26180 PVD RF Match”300mm METAL ENDURA”
0010-33724 PVD RF Match” METAL “0010-30686K High RF Match ECTH,MXP+”DRY”
0010-30686R High RF Match ECTH,MXP+”DRY”0010-09750 RF Match Box,CVD”P-5000 CVD”
0010-09417 RF Match Box,CVD”200mm CVD”0010-04138 RF Match Box,MCVD”CVD”
0010-20525 RF Match Box,PVD”150mm METAL”0010-20524 RF Match Box,PVD”200mm METAL”
0010-30094 RF Match Box,W/PEAK DETECTO” METAL “0010-36162 RF Match Box,SIMPLE CATHODE” METAL “
0010-09416 RF Match Box,ETCH”200mm DRY”0010-00854 RF Match Box,DPS”200mm CENTURA DPS”
0010-36114 RF Match Box,DPS”200mm CENTURA DPS”0010-26408 RF Match Box,DPS”200mm CENTURA DPS”
0010-20855 RF Match Box,DPS”200mm CENTURA DPS”0010-26029 PVD Fixed Match”300mm METAL ENDURA”
0010-23684 Top Match”300mm CVD ULTIMA”0010-23685 Side Match”300mm CVD ULTIMA”
FR2241R3 LF Match Box <COMDEL>”300mm METAL ENDURA1110-01043 Dome Match”200mm DRY”
1110-01046 Dome Match”200mm DRY”0190-01371 HDP Bias Match
0190-13025 AE RPSC RAPID 

Brooks Automation

MagnaTron 7 (MAG7)MTR5ATR8Brooks(旧TRI)ABM405-1-NOZ
MagnaTron 6 (MAG6)MagnaTron 8 (MAG8)ATR7VTR5

PRI

ATM-1×4/105/107/204/205/207/305/405/407DBM-2405/2406/2407/2506/2507/2607
WTM-107/407/511TSB-2407PRE-200 SeriesESC-100/200
4520RVCE   

Genmark

GB3/4/4E/4S/4P/4PS/5/7/7S/7Y/8/8YGENCOBOT

RORZE

RR304/700/701/811/713/721

MECS

ASYST UTC-100/100A/100HG/800/820ASYST UTL-80/100ASYST UTV-400/2500ASYST UTW-2000/3000
ASYST UTX-1100/1200ASYST OF-100A/250/OFH-3000ASYST OFH-100/3000ASYST CS-100/1000
ASYST 300FLASYST ISOPORTASYST LPTASYST YA-400

Kensington

WH3C/4C/4DWFH3C/H4DMilti-Link Module

日立金属<Aera & SAM>

AFC-780CHT× FC-260Aera FC-7810CD× FC-261Aera FC-7810CD× FC-262Aera FC-D980C× LX-1200C
Aera FC-2902-MEPT-T× FC-770 SeriesAera FCPA-PA7850CTBH× FC-771 SeriesAera 5Ra FC-D980C× FC-772 SeriesAera FC-2902MEP5-4V× FC-773 Series
FC-780 SeriesFC-781 SeriesFC-782 SeriesFC-785 Series
FC-786 SeriesFC-980 SeriesFC-981 SeriesFC-982 Series
FC-985 SeriesFC-986 SeriesFC-7700 SeriesFC-7710 Series
FC-7800 SeriesFC-7810 SeriesFC-7850 SeriesFC-7860 Series
FC-D980 SeriesFC-D981 SeriesFC-D982 SeriesFC-D985 Series
FC-D986 SeriesFC-R7700 SeriesFC-R7710 SeriesFC-R7800 Series
FC-R7810 SeriesFC-PA773 SeriesFC-PAR7810 SeriesFC-PAR7820 Series
FC-PAR7850 SeriesFC-PAR7860 SeriesFC-DR980 SeriesFC-DR981 Series
FC-PA7810 Series   

堀場エステック(HORIBA STEC)

SEC-4400MOSEC-7340MO-UCSEC-4400MC-UCSEC-7455MO
SEC-4400MCSEC-4550RCSEC 3030-07663SEC-8460
SEC AMAT 3030-06043SEC-7330MC-UCSEC-7330AMC-302SEC-7455MO-UC
SEC-7330RSEC-Z522KXC-T50SEC-7340MO-UC 

Brooks Instrument<Celerity, Mykrolis, Millipore, Tylan, Tylan General, UNIT Instruments>

UFC-1660UFC–1661UFC–1665UFC-7361
UFC-8160UFC-8161UFC-8165UFC-8261
UFC-8561UFC-8565UNIT 3100UNIT3161
UNIT3165FC260FC261FC262
FC280FC280SAFC2900/FC2910 SeriesFC2900M
FC2920/FC2921 SeriesFC2960MFC2979MIFC125C
FM360FM361FM362FM380
FM380SAFM3900FM3910FM3920
FM3921IntelliFlow Ⅱ(IN2)IntelliFlow 3XP/GF50(IN3XP)IntelliFlow 3XP High Flow Rate
TN2900M Series180C73007301
7301C73047304C8100
81018101C81058105C

荏原製作所(EBARA)

TMP ET series ”ET300WS,ET450C,ET600WS,ET800WS,ET1600WS”
DRY PUMP 従来機”40×20 ,65×40 ,50×20 ,80×25 ,150×40(D,J) ”
DRY PUMP A series ”A07V,A10S,A25S,A30W,A70W,A150W, A200W”
DRY PUMP AA series” AAL10,AA10, AA20, AA30, AA40W, AA70W,AA100W,AA200W”
DRY PUMP AAS series”AAS10,AAS20,AAS40W,AAS70W,AAS100W,AAS200W”
DRY PUMP ESR series ”ESR20N,30,30N,80W,80WN,100WN,200W,200WN,300W,300WN,500W,500WN”
DRY PUMP EST series “EST10N,25N,100WN,200WN,300WN,500WN”

島津製作所(SHIMADZU)

TMP-301/303/801/802/803/1001/1002/1003/2003TMP-280L/550L/1000L/1500LTMP-200CM/200LM/202LM/203LM
TMP-303LMC(A1)/403LMTMP-1002LMTMP-1303LMC
TMP-2003LMTMP-3203LM-N1/LMC-K1/LMEC-K1TMP3403LMC-T1/3403LMC
T4/3603LMC-A1  

EDWARDS(SEIKO SEIKI, BOC EDWARDS)

STP-300C/400C
STP-301/603/1003
STP-600C/H600C/1000C/H1000C
STP-600C/H600C/1000C/H1000C
STP-603C/H803C/1003C/H1301C/H1303C
STP-H301C/451C/2000C/2001C/H2001C/H2001K1B/H2002C
STP-A803H/A1303C/A1603C/A2203C/2503C/3003C/3503C
STP-F2203C/XA2603C/XA2703C/XH2603C/XH2703C/3203C/4503C
STP-iXA2206/iXA3306/iXA4506
STP-L301C
QDP-40 /80
iQDP-40 /80
QMB-250 /500 /1200/2600
IH-80/160/600/1000/1800/1800HTX
IHX-100/200H/610/1210/1210H/1210HT/1220H/1220HTX/1820T/1820/1820H/3030TX/3030/3030T
E2M-0.7/-0.8 /1.5 /5 /8 /12 /18 /28 /40 /80 /175 /275
EH-250/500/1200/2600
QMB-250/500/1200/2600
TPU
ATLUS
SPECTRA
ZENIS

LEYBOLD

TMP35/50/70/151/340M/361/450/600TMP1000C/1100CTW250S/701Mag400/900/1200/2000/2010CHT
MagW830/W1300C/W1500CT/W2000/W2010CHTT1600  

三菱(MITSUBISHI)

PT150/1500FT1200W/1400WFT2200FT3000W/3300W/3301W

大阪真空(OSAKA)

TG050/220F/550TH532TG700M/900M/1000M/1103MTG2000M/2001M/2203M/2300M/2400M

ULVAC

UTM150/500/3301WKEYTRAN

ALCATEL

ATP80/100/150/300/400/900TMP1000C/1100CATP5150/5400/5402CIS
MDP5011ATH400M/1300M/1600M/2300M

Varian

V200A/250/300HT/551/701/1000A/1000HT/1001HT/1000ICE/1800A

Rigaku

RTPG151/300VRC