取扱商品一覧

取扱装置

AMAT

・Centura CVD ・Centura SA ・Centura Wxz
・Centura Etch ・ Endura ・ Endura
・ P5000CVD ・ P5000ETCH ・ PE8300

NOVELLUS

・Concept-One ・Concept-Two(SEQUEL) ・Concept-Two(SPEED)
・Concept-Two(ALTUS) ・PEP3510  

ASM

・Eagle10    

LAM

・TCP9400 ・RAINBOW ・TCP9600

取扱製品

アドバンスドエナジー RF・DC電源各種
アドテックプラズマテクノロジー RF・DC電源各種
日本MKS RF・DC電源各種
ENテクノロジーズ DC電源各種
日立金属 マスフローコントローラー各種
堀場STEC マスフローコノローラー各種
フジキン VALVE・マスフローコントローラー各種

取扱修理対応品(取扱モデル)

AE(RFPP)

AM5 AM10 AM20 AM25
AM30 AM50 AMNP AMNHS
Apex1513 Apex3013 Apex3k2pin Apex5513
Apex10013 Ascent 40k&60k Astral 20k ATL 100
ATLAS 1513/2012 ATX600 ATX CP AZX 10
AZX 63 AZX 72 AZX 90  AZX Dome
Cesar 133 Cesar 136 Cesar 1310 Cesar 1312
Cesar 1320 Cesar 1325 Cesar 1330 Cesar 1350
Cesar 0210 Cesar 2710 Cesar 2720 Cesar 405
Cesar 4020 Cesar 4040 Cesar 6020 Cesar 6020
E-Wave FTMS 2k GenCal HFV 3k
HFV 5k HFV 8k ICP10/20 ID 2500/3500
ID 3501 IDX II LF-5 LF10
LF20 LF30 LFGS 1250 Litmas 1501/3001
LM 5K LM 10K LR 853 MDL II 10K
MDL II 15K MDX 500 MDX 500 DUAL MDX 1K/1.5K
MDX 2.5K MDX 208 5K MDX208 10K MDX308 10K
MDX 15K MDX 20K MDX 25K MDX 30K
MDX 35K MDX 40K MDX 50K MDX 60K
MDX II 15K MDX II 30K MDX-L 6K MDX-L 12K
MDX-L 15K MDX-L 18K Mercury 1K Mercury 3K
Mercury 10K MSD 350 Navigator 1013-L35 Navigator 2060
Navigator 3013 Navigator 3013-ICP Navigator 4040 Navigator 5060/5002
Navigator 5513 Navigator 5513-L80 Navigator 10013 Ovation 2560
Ovation 2760 Paramount 3k PDP 2500 PDX 500
PDX 900 PDX 1250 PDX 1400 PDX 2500
PDX 5000 PDX 8000 PDX II 2K & 3K PDW 2200
PE 1K PE 2.5K PE 3.75K PE 5K
PE 10K PE II 5K PE II 10K Pinnacle 3000
Pinnacle I 6/6K Pinnacle I 6-8K Pinnacle I 12-15K Pinnacle II 6K
Pinnacle II /6/6K Pinnacle II 10K Pinnacle II 10/10K Pinnacle II 12K
Pinnacle II 20K Pinnacle Plus+ 5K Pinnacle Plus+ 5/5K Pinnacle Plus+ 10K
Pinnacle Diamond 8K Pinnacle Diamond 10K Pinnacle Diamond 15K Pulsar 40K
Pulsar 80K Rapid F Rapid OE RF 5
RF10 RF20 RF25 RF30
RF35 RF50 RFDS 1250 RFDS 1251
RFDS 2K2V RFG 2K2V RFG 3000 RFG 3001
RFG 3002 RFG 5500 RFX 600 RFX 600A
RFX II 1250 RFX II 3000 RFX II 5500 Sparc VS
Sparc-le 20K Sparc-le 30K Sparc-le II Sparc-le V
STARBURST SUMMIT 50K UNIT SUMMIT 50K Module Vario Match 600
Vario Match 700 Vario Match 1000 Vario Match 1200 Vario Match 1500
Vario Match 3000 Vario Match 5000 VHF 2060 Xstream
Z-scan      

ADTEC

AX-500 series AX-1000 series AX-2000 series AX-3000 series
TX03 series TX06 series TX06 series TX20 series
TX30 series TS05 series TS10 series TS20 series
TS30 series AMV1000-G5E AMV1000-MAT AMVG series
AM-1000 series AM-2000 series AW-3000 AW-8000II

Trazar

AMU2-1 AMU2C-1 AMU2C-1 AMU10D-2 AMU10E-2 AMU10G-2 RDFS-1 RFS1-3
SRN1-2              

ENI(MKS)

OEM-6 series OEM-650 series OEM-12 series OEM-1250
OEM-2000 OEM-25 series OEM-28 series OEM-50 series
PL-2HF series PL-3G GMW-25A GMW-50A
LPG-1AT LPG-12A ACG-6B ACG-10T
MWD-25LD MHW-25-04 MWH-25-04 MWM-25-02X
NOVA-50A ACG10 1出力 DPG10 2出力 DCG-100Z series
DCG-200Z series GHW-12Z GHW-25 MAGNETRON HEAD
ASTRON RPSC 2L/AX7651 ASTRON RPSC 3L/AX9670 ASTRON RPSC 6L/AX7685 ASTRON RPSC 15L/AX7685

COMDEL

CPS-100/13 CPS-1000/13 CPS-1000M/13 CPS-1001/13 CPS-1001S/13 CPS-1001/60
CPS-1001S/60 CX-600 CX-600S CX-600S/13 CLF-5000 CLX-2500
CLX-1250S FP1543RA        

京三

RFK30 series RFK50 series

DAIHEN

DRFS-5SA DRFS-5SAR2 DRFS-10SB MFG-15SA MFG-20SA MFG-20SA1 MFG-20SA3 MFM-20SA2
AMN-30C11 RMN-30D2 RMN-50B RMN-75A RMN-75A1      

パール工業

LP-150-800K LP-500-800K LP-2000-800K RP-150-2M RP-300-2M RP-300-1356 RP-3000-27M  

AMAT MATCH

0010-21748 PVD RF Match"300mm METAL ENDURA" 0010-13878 PVD RF Match" METAL 工程"
0010-02977 PVD RF Match" METAL 工程" 0010-15877 PVD RF Match" METAL 工程"
0010-01929 PVD RF Match" METAL 工程" 0010-13627 PVD RF Match" METAL 工程"
0010-22161 PVD RF Match" METAL 工程" 0010-02979 PVD RF Match" METAL 工程"
0010-15878 PVD RF Match" METAL 工程" 0010-30236 PVD RF Match" METAL 工程"
0010-02372 PVD RF Match"300mm METAL ENDURA" 0010-26180 PVD RF Match"300mm METAL ENDURA"
0010-33724 PVD RF Match" METAL 工程" 0010-30686K High RF Match ECTH,MXP+"DRY工程"
0010-30686R High RF Match ECTH,MXP+"DRY工程" 0010-09750 RF Match Box,CVD"P-5000 CVD"
0010-09417 RF Match Box,CVD"200mm CVD" 0010-04138 RF Match Box,MCVD"CVD工程"
0010-20525 RF Match Box,PVD"150mm METAL" 0010-20524 RF Match Box,PVD"200mm METAL"
0010-30094 RF Match Box,W/PEAK DETECTO" METAL 工程" 0010-36162 RF Match Box,SIMPLE CATHODE" METAL 工程"
0010-09416 RF Match Box,ETCH"200mm DRY" 0010-00854 RF Match Box,DPS"200mm CENTURA DPS"
0010-36114 RF Match Box,DPS"200mm CENTURA DPS" 0010-26408 RF Match Box,DPS"200mm CENTURA DPS"
0010-20855 RF Match Box,DPS"200mm CENTURA DPS" 0010-26029 PVD Fixed Match"300mm METAL ENDURA"
0010-23684 Top Match"300mm CVD ULTIMA" 0010-23685 Side Match"300mm CVD ULTIMA"
FR2241R3 LF Match Box <COMDEL>"300mm METAL ENDURA 1110-01043 Dome Match"200mm DRY工程"
1110-01046 Dome Match"200mm DRY工程" 0190-01371 HDP Bias Match
0190-13025 AE RPSC RAPID  

Brooks

Brooks MagnaTron 7 Brooks MTR5 Brooks ATR8 Brooks(旧TRI)ABM405-1-NOZ

PRI

PRI 105/107 PRI 205/207 PRI 305 PRI 407

Genmark

Genmark GB4P Genmark GB4P Genmark GB7 Genmark GB7Y Genmark GB8 Genmark GB8Y

Aera

Aera FC-780CHT Aera FC-7810CD Aera FC-7810CD Aera FC-D980C
Aera FC-2902-MEPT-T Aera FCPA-PA7850CTBH Aera 5Ra FC-D980C Aera FC-2902MEP5-4V

STEC

STEC SEC-4400MO STEC SEC-7340MO-UC STEC SEC-4400MC-UC STEC SEC-7455MO
STEC SEC-4400MC STEC SEC-4550RC STEC 3030-07663 STEC SEC-8460
STEC AMAT 3030-06043 STEC SEC-7330MC-UC STEC SEC-7330AMC-302 STEC SEC-7455MO-UC
STEC SEC-7330R STEC SEC-Z522KXC-T50 STEC SEC-7340MO-UC  

CELERITY

CELERITY UFC-1660 CELERITY UFC-8561 CELERITY UFC-8165 CELERITY UFC-8565

EBARA

TMP ET series ”ET300WS,ET450C,ET600WS,ET800WS,ET1600WS”
DRY PUMP 従来機”40x20 ,65x40 ,50x20 ,80x25 ,150x40(D,J) ”
DRY PUMP A series ”A07V,A10S,A25S,A30W,A70W,A150W, A200W”
DRY PUMP AA series” AAL10,AA10, AA20, AA30, AA40W, AA70W,AA100W,AA200W”
DRY PUMP AAS series”AAS10,AAS20,AAS40W,AAS70W,AAS100W,AAS200W”

SHIMADZU

TMP-301 TMP-303 TMP-801 TMP-1001 TMP-1002 TMP-1003 TMP-2003  

SEIKO SEIKI(EDWARDS)

STP-300C/400C
STP-600C/H600C/1000C/H1000C
STP-600C/H600C/1000C/H1000C
STP-603C/H803C/1003C/H1301C/H1303C
STP-H2000C/2001C/H2001C/H2001K1B/H2002C
STP-A803H/A1303C/A1603C/A2203C/2503C/3003C/3503C
STP-F2203C/XA2603C/XA2703C/XH2603C/XH2703C
QDP-40 /80
iQDP-40 /80
QMB-250 /500 /1200/2600
E2M-0.8 /1.5 /5 /8 /12 /18 /28 /40 /80 /175 /275
EH-250/500/1200/2600
QMB-250/500/1200/2600

LEYBOLD

TMP35/50/70/151/340M/361/450/600 TMP1000C/1100C TW250S/701 Mag400/900/1200/2000/2010CHT
MagW830/W1300C/W1500CT/W2000/W2010CHT