中古装置情報

中古装置一覧

Equipment Manufacture Model Vintage Wafer Serial No. Configuration Notes
Furnace TEL ALPHA-8S 1996 200 300009675208 PYRO  
Furnace TEL ALPHA-8S 1997 200 A000097Y5641 PYRO  
Furnace TEL ALPHA-8S 1999 200 A000099X5154 HTO  
Furnace TEL ALPHA-8S 1997 200 A00009755227 PIQ  
CVD Novellus Concept-1-200 1992 200 92-04-580 TEOS/SiO2  
PVD Canon ANELVA COSMOS I-1201PVD 2002 200 37888-1 PVD for Bump  
Trak TEL ACT-12 2003 200 E-130675 1C2D,LtoR,Foup  
Trak TEL ACT-12 2004 200 E-140807 1C2D,LtoR,Foup  
CVD AMAT P5000 1995 150 4585 DxL BPSG SACVD x3ch  PLIS gas box
CVD AMAT P5000 1993 200 5870 DXL Delta TEOS x2ch Ver4 HOT Box
CVD AMAT P5000 1992 200 5783 DXL Delta TEOS x2ch Ver4 HOT Box
CVD AMAT P5000 1992 200 5757 DXL Delta TEOS x2ch Ver4 HOT Box
CVD AMAT P5000   200   Poly Etch x3ch  
CVD AMAT P5000   150   Metal x2ch,ASP x1ch  
Metrology KLA OP-2600 1996 200 6423-1296 Thinkness Measurment  
Furnace TEL INDYPLUS   300 S00001055154 ALD  
Furnace TEL INDYPLUS   300 S00001045074 ALD  
Furnace TEL INDYPLUS   300 S00001055114 ALD  
Furnace TEL INDYPLUS   300 S00001065159 ALD  
Furnace TEL INDYPLUS   300 S000010Y5444 ALD  
Furnace KOKUSAI DJ-1206VN-DF   300 2DC6-14902 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 2DC6-14761 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14436 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14285 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14289 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14284 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14094-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14508-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14509-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14441-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14901-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14510-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14215-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14562-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14240-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14274-1 TiN CX-5000
Furnace KOKUSAI DJ-1206VN-DF   300 T2DC6-14563-1 TiN CX-5000