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中古装置情報

中古装置

Novellus　C-1　150　TEOS　2007MODEL

形式　/　System Model

● System Type : NITRIDE/TEOS
● Serial Number : 07-03-01
● Wafer Size : 150mm

構成　/　System Configuration

● Software Ver,4.433
● New Generation Computer Assy
● New One Arm Robot
● Non-Contact Pin Search
● DC Quad / 24V / 90V Power Supply output
● Microcontamination Package
● Heated Gate Valve & Throttle Valve
● External Foreline
● ELO Touch LCD monitor & Color LCD Back Side monitor
● Dual Window
● Dual End Point System
● Isolation TC Assy
● Dual Frequensy 【HF】 RFG-3000　※USED 【LF】 PDX-1400　※USED
● RF Network TRAZAR MATCH
● Slotted Heater Block : 19-00155-01
● New Generation Terminal Panel : 02-032615-00 Rev.k
● New Generation GAS Panel
● New Generation Main AC BOX & Remote AC Box
● TEOS　Ｏｐｔｉｏｎ　　POATER　Control　Unit　＆　LFC
● TEOS Delivery system 　　Fuji　FILM　Genstream
● TRANSFORMER　　TOKYO　SEIDENN　50KVA　※USED

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Concept-One　150　SiO2/NITRIDE　1994 Model　　S/N：94－36－838

Concept-One　150　SiO2/NITRIDE　1994 Model　S/N：94－36－838

構成　/　System Configuration

● Software Ver,4.433
● Computer P166
● STD One Arm Robot
● Non-Contact Pin Search
● DC Quad / 24V / 90V Power Supply output
● Microcontamination Package
● Heated Gate Valve & Throttle Valve
● External Foreline
● ELO Touch LCD monitor & Color LCD Back Side monitor
● Dual Window
● Isolation TC Assy
● Dual Frequensy 【HF】 ENI　OEM-25 【LF】 ENI　PL-2HF
● RF Network TRAZAR MATCH　AMU2-1
● STD Heater Block
● New Generation Terminal Panel : 02-032615-00
● New Generation GAS Panel
● New Generation Main AC BOX & Remote AC Box
● DRY　PUMP　P/C　Edwards　QDP-80　＆　QMB1200
● DRY　PUMP　L/L　Edwards　QDP-80　
● TRANSFORMER　　KYONAN　ELEC　36KVA　STD

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Concept-One　150　NITRIDE/TEOS 1995 Model S/N：95－38－1070

構成　/　System Configuration

● Software Ver,4.433
● New Generation Computer Assy
● New One Arm Robot
● Non-Contact Pin Search
● DC Quad / 24V / 90V Power Supply output
● Microcontamination Package
● Heated Gate Valve & Throttle Valve
● LCD Back Side monitor　　※Touch SCREEN →None
● Dual Window
● Single End Point System
● Isolation TC Assy
● Dual Frequensy 【HF】 ENI　OEM-25 【LF】 ENI　PL-2HF
● RF Network TRAZAR MATCH
● Slotted Heater Block : 19-00155-01
● New Generation Terminal Panel : 02-032615-00
● New Generation GAS Panel
● New Generation Main AC BOX & Remote AC Box
● TEOS　Ｏｐｔｉｏｎ　　POATER　Control　Unit　＆　LFC
● TEOS Delivery system 　　Siguma-6
● DRY　PUMP　P/C　→　KASHIYAMA　SD100V-01-60＆KMB-101
● DRY　PUMP　L/L　→　KASHIYAMA　SD90V　Ⅲ
● TRANSFORMER　　TOKYO　SEIDENN　36KVA

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Concept-One　200　W　 1996 Model S/N：96－07－2080

Concept-One　200　W　1996 Model S/N：96－07－2080

構成　/　System Configuration

● Software Ver,4.433
● Computer P166
● STD One Arm Robot
● Non-Contact Pin Search
● DC Quad / 24V / 90V Power Supply output
● Microcontamination Package
● STD Gate Valve & Throttle Valve
● External Foreline
● LCD Back Side monitor　　※Touch SCREEN →None
● Dual Window
● Single Frequensy 【HF】 ENI　OEM-28B
● RF Network TRAZAR MATCH
● RF Network TRAZAR MATCH
● New Generation Terminal Panel : 02-032615-00 Rev.k
● New Generation GAS Panel
● New Generation Main AC BOX & Remote AC Box
● DRY　PUMP　P/C　→　EBARA　A150W-M
● DRY　PUMP　L/L　→　EBARA　A10S
● TRANSFORMER　→　None